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This book focuses on the industrial perspective on micro- and nanofabrication methods, including large-scale manufacturing, the transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization and micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices. In the second edition, a new focus area is nanoengineering as an important driver for the rise of novel applications by integrating bio-nanofabrication into microsystems. Other new material covers lithographic mould fabrication for soft-lithography, nanolithography techniques, corner lithography, advances in nanosensing, and the developing field of advanced functional materials. Luttge also explores the view that micro- and nanofabrication will be the key driver for a tech-revolution in biology and medical research. A new case study covers the developing organ-on-chip concept. An interdisciplinary approach that makes micro/nanofabrication accessible equally to engineers and those with a life science background - both in an academic setting and in commercial R&DProvides readers with guidelines for assessing the commercial potential of any new technology based on micro/nanofabrication, thus reducing the investment riskThe second edition presents nanoengineering as an important driver for the rise of novel applications, by integrating bio-nanofabrication into microsystems"